diff --git a/framework/src/Volo.Abp.Cli.Core/Volo/Abp/Cli/ServiceProxying/CSharp/CSharpServiceProxyGenerator.cs b/framework/src/Volo.Abp.Cli.Core/Volo/Abp/Cli/ServiceProxying/CSharp/CSharpServiceProxyGenerator.cs
index 64947e637f..c4d1b5da4c 100644
--- a/framework/src/Volo.Abp.Cli.Core/Volo/Abp/Cli/ServiceProxying/CSharp/CSharpServiceProxyGenerator.cs
+++ b/framework/src/Volo.Abp.Cli.Core/Volo/Abp/Cli/ServiceProxying/CSharp/CSharpServiceProxyGenerator.cs
@@ -9,6 +9,7 @@ using Volo.Abp.Cli.Commands;
 using Volo.Abp.Cli.Http;
 using Volo.Abp.DependencyInjection;
 using Volo.Abp.Http.Modeling;
+using Volo.Abp.IO;
 using Volo.Abp.Json;
 
 namespace Volo.Abp.Cli.ServiceProxying.CSharp;
@@ -162,7 +163,10 @@ public class CSharpServiceProxyGenerator : ServiceProxyGeneratorBase<CSharpServi
     private async Task CreateJsonFile(GenerateProxyArgs args, ApplicationApiDescriptionModel applicationApiDescriptionModel)
     {
         var folder = args.Folder.IsNullOrWhiteSpace() ? ProxyDirectory : args.Folder;
-        var filePath = Path.Combine(args.WorkDirectory, folder, $"{args.Module}-generate-proxy.json");
+        var directory = Path.Combine(args.WorkDirectory, folder);
+        DirectoryHelper.CreateIfNotExists(directory);
+        
+        var filePath = Path.Combine(directory, $"{args.Module}-generate-proxy.json");
         using (var writer = new StreamWriter(filePath))
         {
             await writer.WriteAsync(JsonSerializer.Serialize(applicationApiDescriptionModel, indented: true));
@@ -187,7 +191,7 @@ public class CSharpServiceProxyGenerator : ServiceProxyGeneratorBase<CSharpServi
         classTemplateEmptyPart.Replace(NamespacePlaceholder, rootNamespace);
 
         var filePath = Path.Combine(args.WorkDirectory, folder, $"{clientProxyName}.cs");
-        Directory.CreateDirectory(Path.GetDirectoryName(filePath));
+        DirectoryHelper.CreateIfNotExists(Path.GetDirectoryName(filePath)!);
         if (!File.Exists(filePath))
         {
             using (var writer = new StreamWriter(filePath))
@@ -223,7 +227,7 @@ public class CSharpServiceProxyGenerator : ServiceProxyGeneratorBase<CSharpServi
         classTemplate.Replace($"{Environment.NewLine}{Environment.NewLine}    {MethodPlaceholder}", string.Empty).Replace(MethodPlaceholder, string.Empty);
 
         filePath = Path.Combine(args.WorkDirectory, folder, $"{clientProxyName}.Generated.cs");
-        Directory.CreateDirectory(Path.GetDirectoryName(filePath));
+        DirectoryHelper.CreateIfNotExists(Path.GetDirectoryName(filePath)!);
         using (var writer = new StreamWriter(filePath))
         {
             await writer.WriteAsync(classTemplate.ToString());
@@ -253,7 +257,7 @@ public class CSharpServiceProxyGenerator : ServiceProxyGeneratorBase<CSharpServi
             interfaceTemplate.Replace(NamespacePlaceholder, rootNamespace);
 
             filePath = Path.Combine(args.WorkDirectory, folder, $"{appServiceTypeName}.cs");
-            Directory.CreateDirectory(Path.GetDirectoryName(filePath));
+            DirectoryHelper.CreateIfNotExists(Path.GetDirectoryName(filePath)!);
             using (var writer = new StreamWriter(filePath))
             {
                 await writer.WriteAsync(interfaceTemplate.ToString());